Nanoimprint Lithography (NIL)

เครื่องสร้างโครงสร้างระดับ Nano ด้วยวิธี Lithography

There is a manual and affordable lithography solution available for Nano Imprint Lithography (NIL) from Obducat which allows pattern replication in the micrometer and nanometer range. Excellent residual layer thickness control across the entire imprint area achieved by the embedded SoftPress® technology, which enable an accurate pattern transfer. 

The systems are very flexible and a variety of imprint processes such as hot embossing, thermal NIL, UV NIL and Obducat's unique Simultaneous Thermal and UV (STU®) process can be used.

  • Full area imprint
  • SOFTPRESS® Technology
  • User-friendly interface
  • Multiple imprint process capability
  • Wide range of configuration possibilities
  • Sub-20nm residual layer thickness
  • Semi-auto and high volume production models also available



LMS Instruments Co., Ltd.

128/190 Phyathai Plaza Building, 17th Floor Phyathai Road, Thung – Phyathai, Radthavee, Bangkok 10400

Tel : 66(0) 2 612 9091,66(0) 2 612 9092
Fax : 66(0) 2 612 9093
E-mail :

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LMS TInstruments Co., Ltd. (Distributor & Supplier of Testing Instruments in Thailand)
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