High-performance FE-SEM with integrated chemical and structural analysis

The Thermo Scientific Apreo ChemiSEM System is a Schottky Field Emission Scanning Electron Microscope (FESEM) that delivers ultra-high resolution across both high- and low-voltage applications. Its electrostatic lens design and low vacuum mode enable effective charge compensation for non-conductive materials. Equipped with beam deceleration and unique in-lens detection, the system provides exceptional contrast and versatility for researchers studying diverse materials and devices.

Designed to simplify materials science research, the Apreo ChemiSEM makes advanced imaging and analysis accessible to all users. Smart Frame Integration (SFI) and enhanced autofocus/autostigmation functions ensure effortless acquisition of high-resolution images, EDS, and EBSD data.

The integrated ChemiSEM Technology revolutionizes EDS analysis by embedding it directly into the microscope’s interface, reducing user bias and ensuring consistent, reliable results. With real-time quantification and automated data processing, ChemiSEM Technology accelerates analysis while maintaining precision—revealing hidden material details and delivering deeper insights.

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ChemiSEM Technology seamlessly combines imaging and chemical analysis (EDS and phase analysis) in a single platform. The new TruePix EBSD detector provides high-speed, direct electron detection for exceptional low beam energy performance and single particle counting.

Revolutionize Phase Analysis with ChemiPhase: Pinpointing Material Phases Made Easy

Deformed high-entropy alloy analyzed with the TruePix Detector. Top line IPF (X,Y,Z) orientation maps, bottom line: Grains, Euler and Kernel-average misorientation strain map.

Gain a comprehensive understanding of your samples with the Apreo ChemiSEM System. Its improved characterization approach reveals everything from morphology to chemical and structural composition, and its user-friendly software ensures fast time to data and reliable results.

Newly developed autofunctions allow a wide range of users to obtain high resolution results with ease.

Left: Image acquired without SFI shows elongated magnesium oxide particles.
Right: Image acquired with SFI eliminates artifacts.
Accelerating voltage: 1 keV.
Beam current: 50 pA.
Captured with theT1 detector.

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